kla-tencor SFS6420 晶圆检测系统

Product Description

The Surfscan 6420 is a versatile surface inspection tool designed to meet the needs of a broad range of applications. Utilizing the latest developments in optical technology, the system easily detects sub-micron particles on rough surfaces such as polysilicon and tungsten, yet provides sensitivity better than 0.10 μm on polished silicon and epitaxial layers. The system's unique combination of oblique illumination, selectable polarization and side collection optics also makes it ideal for detecting defects on non-uniform films -- a critical requirement for CMP applications.

The Surfscan 6420 is based on the established Surfscan 6000 series platform, and offers superior performance, low cost of ownership and high throughput.
Selected Specifications Sensitivity: 0.10 μm at 95% capture rate (latex spheres on bare silicon) Throughput: Up to 100 wph (200 mm) Repeatability: Within 1%, 1 σ (mean count > 500, 0.204 μm diameter latex spheres) Illumination Source: Argon-ion laser, 488 nm Sample Sizes: 100 mm to 200 mm (smaller sizes upon request); round or square samples Dimensions: 75 cm (W) x 77 cm (D) x 168 cm (H)