Tel REL-4800 晶圆探针台
发布时间：2017/6/30 17:25:12 修改时间：2017/6/30 17:25:12 浏览次数：1307
Tel REL-4800 晶圆探针台

This guide contains information to help prepare your facility for the arrival of your REL-6100 or REL-4800 probe station
. ? The REL-6100 offers a programmable x-/y- stage, chuck theta, and z-axis
? The REL-4800 offers manual controls with unmovable chuck z-motion.
Probe Station Requirements
Vacuum Vacuum ? 400mm (15 inches) of mercury minimum ? Minimum vacuum required: 3.4 liters/minute (0.12 SCFM)
Vacuum connection ? 3.175 mm (0.125-inch) I.D. polyurethane tubing ? 2.4 m (8 feet) provided Air for Platen Lift Assist Pressure ? 5.5 - 8.6 MPa (55 - 125 psi) Available Flow ? 0.7 liters/minute (0.025 SCFM) minimum Quality ? Oil-free, clean, dry, filtered (coalescing air filter recommended) Connection ? 6.35 mm (0.25-inch) O.D. plastic tubing ? 3.0 m (10 feet) provided Power Outlets ?
Up to four additional power outlets are available depending on the configuration and are rated at 115 V / 230 V for accessories. Power requirements for accessories ? Vacuum pump 1 A / 0.5 A ? Air compressor (platen lift assist) 3 A / 1.5 A ? Video camera 0.5 A / 0.25 A ? Video monitor 2.5 A / 1.25 A ? Laser 6 A / 3 A ? Laser illuminator 3 A / 1.5 A ? Microscope illuminator 2.5 A / 1.25 A ? Computer 3 A / 1.5 A ? Computer monitor 2.5 A / 1.25 A Environmental Conditions Operating ? Indoors only Temperature ? 23°C ± 3°C Humidity ? 40% ± 20% Additional Equipment Workbench ? Size: 1.2 m (4 feet) wide x 0.8 m (2.5 feet) deep minimum ? Capacity: 230 kg (500-pound) minimum
Dimensions Station with microscope ? 736.5 mm/29 in. (W) x 635 mm/25 in. (D) x 533.4 mm/21 in. (H) ? Height will increase by 254 mm/10 in. with the addition of a laser and video camera Laser Control Box ? 254 mm/10 in. (W) x 304 mm/12 in. (D) x 203 mm/8 in. (H) Video Monitor ? 508 mm/20 in. (W) x 508 mm/20 in. (D) x 508 mm/20 in. (H) ECX-56 Control Box ? 254 mm/10 in. (W) x 304 mm/12 in. (D) x 203 mm/8 in. (H) Computer ? 177 mm/7 in. (W) x 508 mm/20 in. (D) x 330 mm/13 in. (H) Computer Monitor ? 432 mm/17 in. (W) x 508 mm/20 in. (D) x 457 mm/18 in. (H) Joystick ? 127 mm/5 in. (W) x 203 mm/8 in. (D) x 102 mm/4 in. (H) Illuminator ? 210 mm/8.25 in. (W) x 241 mm/9.5 in. (D) x 10 mm/4.35 in. (H)
Weight REL 4800 ? 118 kg (260-pound) REL 6100 ? 136 kg (300-pound) Lifting requirements To avoid personal injury and/or damage to the station, four (4) people are required to lift the probe station onto the table (handles should be removed after placement). Note that the weight is not distributed evenly between all four corners of the station. The rear of the station is heavier than the front. Shipping Dimensions Crate for R48 or R61 ? 902 mm/35.5 in. (W) x 1066 mm/42 in. (D) x 761 mm/30 in. (H)

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